The Model AGD regulator is designed for use with ultra high purity, corrosive gases, such as those used in semiconductor manufacturing. This regulator features convoluted stainless steel diaphragms and tied seats (tied diaphragms) in both stages providing for greater sensitivity and sealing integrity. The two-stage design provides constant outlet pressure regardless of changes in cylinder (inlet) pressure.

• Tied Seats in both stages ensure positive shutoff if particulate matter should lodge in the seat, a common problem with corrosive gases.
• 1?16" NPT Female Bonnet Vent Ports and Stem Packing allow for complete capturing of bonnets when connected to a vent line or disposal system.
• Two-Stage Regulator Design ensures constant delivery pressure over varying inlet pressures.
• Type 316 Stainless Steel Bar Stock Construction provides maximum corrosion resistance.
• Metal to Metal Diaphragm to Body Seal (without back-up o-ring) assures maximum diffusion resistance.
• High Purity Regulator Design permits vacuum purging of regulator.
• Diaphragm Seal Outlet Valve maintains gas purity.
• Filter traps foreign matter, extends regulator life and reduces maintenance.

• Mounting Ring permits regulator to be panel mounted.
• Internal (Inboard) Helium Leak Test and Test Report determines inboard leak rate of gas from regulator to atmosphere; test report certifies leak rate of less than 2 x 10^-8 sccs air equivalent.
• External (Outboard) Helium Leak Test and Test Report determines outboard leak rate of gas from regulator to atmosphere; test report certifies leak rate of less than 5 x 10^-7 sccs air equivalent.
  

Table I