Advanced Specialty Gas Equipment

Regulator for Specific Applications Model SG3865 Regulator with Rupture Disk AssemblyREGULATORS FOR SPECIFIC APPLICATIONS
SG3860 Series
Silane & Dichlorosilane, Positive Seal
(Tied Seat) Regulators

These regulators are specifically designed to handle the unique properties of Silane and Dichlorosilane.




Standard Features
  • Type 316 Stainless Steel Construction provides maximum corrosion resistance.
  • 2 1/2" Stainless Steel Gauges read easily for more precise settings.
  • Tied Seat (tied diaphragm) reduces premature regulator failure caused by silicon dioxide build-up on seat created by reaction of silane with air.
  • Unique Regulator Design permits regulator to be used with low vapor pressure gases such as Dichlorosilane.
  • Diaphragm Seal Outlet Valve maintains gas purity.
Optional Features
  • Rupture Disk Assembly (Model SG3862, SG3865 & SG3866 Only) prevents overpressurization of regulator and downstream system and allows for connection to a disposal system.
  • Bonnet Vent Connector provides1/8" NPT female port allowing bonnet to be connected to a vent line or disposal system as a precaution in the unlikely event of a diaphragm failure.
  • Internal (Inboard) Helium Leak Test and Test Report determines inboard leak rate; test report certifies leak rate of less than 2 x 10-8 sccs air equivalent.
  • External (Outboard) Helium Leak Test and Test Report determines leak rate of gas from regulator to atmosphere; test report certifies leak rate of less than 5 x 10-7sccs air equivalent.
Maximum Inlet Pressure

Inlet Pressure Gauge

Delivery Pressure Range

Delivery Pressure Gauge

Gauge Size: 2 1/2" Dial

Flow Coefficient:
  Regulator: Cv = 0.624
  Outlet Valve: Cv = 0.17

Inlet Connection: SG3862, SG3865 & SG3866:
  CGA 350 for Silane & Silane Mixtures
  SG3860: CGA 678 for Dichlorosilane

Outlet Connection:1/4" NPT female (on outlet valve)

Optional Rupture Disk Vent Connection:
  1/4" NPT male

Supply Pressure Effect:
1 psi per 100 psi (approximate)

Approximate Weight: 7 lbs

Materials of Construction
Body: Type 316 Stainless Steel Bar Stock
Outlet Valve and Gauges: Type 316 Stainless Steel
Bonnet: Nickel-Chrome Plated Brass
Other Metal Parts Exposed to Gas:
   Type 316 Stainless Steel
Seats (Regulator and Outlet Valve): PCTFE
Diaphragm: Type 316 Stainless Steel
Seals: PTFE

Optional Equipment

Equipment Part No.
Inboard Helium Leak Test and Test Report  HT1000
Outboard Helium Leak Test and Test Report HT1001
Bonnet Vent Connector* * SG5647V
PTFE Washers for CGA 678 (package of 25) SG6077
Purge Assemblies* * (Cross purge assemblies are recommended)
** If selected, these items are not installed on the regulator. They are shipped as separate items.

Table I

Part No. Service Inlet
Pressure (psig)
Pressure (psig)
Max. Gauge Range Gauge
SG3862 Silane or Silane Mixtures 3000 0-4000  2-15 *
SG3865 Silane or Silane Mixtures 3000 0-4000 3-75 0-100
SG3866 Silane or Silane Mixtures 3000 0-4000 10-150 0-200
SG3860  Dichlorosilane 30 0-60  2-15 *
* This is a compound gauge with a range of 30" Hg vacuum of 0 to 30 psig.

Table II, Optional Rupture Disk Assembly

Rupture Disk
Assembly Part No.
Rupture Pressure
Replacement Rupture
Disk Part No.
SG3866 SG3867 190-200 0202-3410
SG3865 SG3868 90-100 0202-3411
SG3862 SG3869 65-75 0202-3412
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